Category High purified graphite felt for semiconductor Industriy
Online consultationUltra Pure Hard Composite Felt Technical Specifications | ||||
Technical Specifications | Unit | Measure ambient temperature (℃) | HighPuritySol idification Felt (S-level) | |
密度(Volume Density) | g/cmᶟ | 20℃ | 0.15-0.30max | |
Specific Resistance | Longitudinal | Ω-mm | 20℃ | 2.0*10^-4 |
Transverse | Ω-mm | 20℃ | 3.5*10^-4 | |
compressive strength(5%deformation) | Longitudinal | Mpa | 20℃ | 1.8 |
Transverse | Mpa | 20℃ | 1.3 | |
bending strength(5%deformation) | Longitudinal | Mpa | 20℃ | 2.3 |
Transverse | Mpa | 20℃ | 1.8 | |
Heat shrinkage rate | 10^-6 | 3000℃ | 2.5±0.5 | |
Water Absorption(90%relative humidity) | weight% | 20℃ | <0.1% | |
Carbon Content | % | 25*℃ | ≥99.9 | |
Ash Content | PPM | 25℃ | ≤5PPM | |
Specific Heat(average) | W-sec/(g.K) | 1400℃ | 1.72 | |
Sublimation Temperature | ℃ | \ | 3600 | |
Thermal Conductivity | W/(m-K) | 1400℃ | vacuum:0.25 | |
argon:0.35 | ||||
Processing Temperature | ℃ | \ | ≥2200 | |
Available Size | mm | \ | board:≤1600 | |
barrel:Φ≤1600 | ||||
thickness:20-200 | ||||
External surface treatment | \ | \ | 1: Paste graphite thin paper 2: Attach carbon fiber cloth |
Ultra Pure Soft Felt Technical Specifications | |||
Technical Specifications | Unit | Measure ambient temperature (℃) | Ultra high purity graphite soft felt (S-level) |
(HighPurity Graphite felt) | |||
Volume Density | g/cmᶟ | 20℃ | 0.06-0.10max |
Specific Resistance | Ω-m | 20℃ | 6-9*10^-3 |
tensile strength(5%deformation) | MPA | 25℃ | 0.10-0.25 |
Heat shrinkage rate | 10^-6 | 0-3000℃ | 2.5±0.5 |
Water Absorption | weight% | \ | <0.1% |
(90%relative humidity) | |||
Carbon Content | % | 25℃ | ≥99.9 |
Ash Content | PPM | 25℃ | ≤5PPM |
Specific Heat(average) | W.sec/(g-K) | 1400℃ | 1.72 |
Sublimation Temperature | ℃ | \ | 3600 |
Thermal Conductivity | w/(m-K) | 1400℃ | vacuum:0.14 |
argon:0.18 | |||
Processing Temperature | ℃ | \ | ≥2220 |
Available Size | MM | \ | Lengthmm:3000-12000 |
Widthmm:1000-1400 | |||
Thicknessmm :3 -25 |